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The summary of multi-DoF gyroscopes.
| Institute | Time | Fabrication | DoF | Detected Axis | References |
|---|---|---|---|---|---|
| UC Irvine | 2006–2011 | Bulk micromachining | 2-DoF sense, 1-DoF drive | Z | [59–62] |
| 2011 | SOI | 1-DoF sense, 2-DoF drive | Z | [63] | |
| 2007 | SOI | 4-DoF sense, 2-DoF drive | Z | [65] | |
| CMU | 2009 | SOG | 2-DoF sense, 1-DoF drive | Z | [64] |
| HEU | 2012 | Bulk micromachining | 2-DoF sense, 2-DoF drive | Z | [66] |
| Pakistan | 2011 | MetalMUMP | 1-DoF sense, 2-DoF drive | Z | [67] |
