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The summary of multi-axis MVGs.
| Institute | Time | Fabrication | Axis | Materials | Detected Axis | References |
|---|---|---|---|---|---|---|
| Berkeley | 1997 | Surface micromachining |
2 | Polysilicon | X/Y | [68] |
| Georgia Tech |
2011 | HARPSS | 2 | Polysilicon | X/Y | [69] |
| NTHU | 2006 | Surface micromachining |
2 | Polysilicon | X/Y | [70] |
| NTU | 2009 | CMOS-MEMS | 2 | Polysilicon | X/Y | [3] |
| NCKU | 2012 | Bulk micromachining |
2 | Silicon, glass | X/Z | [71] |
| 2008–2010 | Bulk micromachining |
3 | Silicon, glass | X/Y/Z | [72–74] |
