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. 2014 Jan 14;14(1):1394–1473. doi: 10.3390/s140101394

Table 8.

The summary of SAW gyroscopes.

Institute Time Fabrication Frequency(MHz) Substrate Materials References
Ajou
University		 2009–2012 Lift-off 80 128° YX
LiNbO3 		Al,Au [87–89]
CAS 2010 Evaporation
and wet etching		 80 128° YX
LiNbO3 		Al [90]
NUDT 2009 Evaporation
and wet etching		 95.9 128° YX
LiNbO3 		Al [92]