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Thickness measurements obtained via interferometry for ppNIPAM samples deposited using various operating conditions. A refractive index of 1.59 was used for all surfaces.
| Thickness | |
|---|---|
| (nm) | |
| Upstream | 40.0±13 |
| Midstream | 88.3±24 |
| 1st Use | 60.8±9 |
| 2nd Use | 36.1±23 |
| 140 mTorr | 52.3±11 |
| 250 mTorr | 31.6±5 |
| 1 Turn | 38.8±6 |
| 5 Turns | 89.6±16 |
| 80W | 36.4±12 |
| 100W | 49.2±14.4 |
