. Author manuscript; available in PMC: 2014 Mar 13.

Published in final edited form as: Plasma Process Polym. 2010 Oct 22;7(12):992–1000. doi: 10.1002/ppap.201000065

Table 5.

Thickness measurements obtained via interferometry for ppNIPAM samples deposited using various operating conditions. A refractive index of 1.59 was used for all surfaces.

	25 °C	37 °C

	(nm)	(nm)
Upstream	36.9 °±4.7	49.5 °±3.4
Midstream	53.1 °±6.1	52.6 °±3.3
1^st Use	27.1 °±3.4	42.4 °±4.3
2^nd Use	27.5 °±3.8	43.5 °±5.3
140 mTorr	35.8 °±4.6	47.1 °±3.9
250 mTorr	37.9 °±4.4	46.1 °±2.8
1 Turn	38.2 °±0.5	46.0 °±3.8
5 Turns	47.5 °±13.1	55.2 °±10.1
80W	44.9 °±4.4	54.6 °±5.1
100W	38.5 °±5.4	44.8 °±5.1