Table 1.
Switch specifications.
| Component | Length μm |
Width μm |
Depth μm |
Material |
|---|---|---|---|---|
| Substrate | 1000 | 1060 | 500 | Silicon |
| Substrate dielectric | 1000 | 1060 | 0.5 | HfO2 |
| CPW (G S G) (A) | 14 | 20 | 14 | Gold |
| CPW (G S G) (B) | 28 | 40 | 28 | Gold |
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