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Dimensions of ohmic RF MEMS switches.
| Parameter | Dimensions | Material |
|---|---|---|
| Contact switch | 316 × 120 μm2 | Gold |
| Pull-down electrode × 2 | 50 × 120 μm2 | Gold |
| Gap height, g 0 | 2 μm | — |
| Hole diameter | 3 μm | — |
| Contact metal × 2 | 15 × 80 μm2 | Gold |
| Anchors | 10 × 120 μm2 | Gold |
