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Dimensions of capacitive RF MEMS switches.
| Parameter | Dimensions | Material |
|---|---|---|
| Contact switch | 378 × 180 μm2 | Gold |
| Pull-down electrode × 2 | 110 × 100 μm2 | Gold |
| Gap height, g 0 | 3 μm | — |
| Hole diameter | 3 μm | — |
| Dielectric area | 40 × 100 μm2 | HfO2 |
| Dielectric thickness | 0.15 μm | Gold |
