Table 1. Statistics of switching parameters of the ZnO thin films. μ and COV are average value and coefficient of variation, respectively.

Sample	HRS (Ω)	LRS (Ω)	Vset (V)	Vreset (V)	Ireset (mA)
ZnO	μ = 4260.91	μ = 33.68	μ = 1.28	μ = 0.56	μ = 14.14
	COV = 77%	COV = 9%	COV = 13%	COV = 12%	COV = 24%
F-modified ZnO	μ = 6736.97	μ = 37.41	μ = 1.56	μ = 0.76	μ = 12.66
	COV = 38%	COV = 5%	COV = 5%	COV = 9%	COV = 12%