Table 4.
Positional error effects. The diagonal elements show the centroid positional measurement error as determined from a fit to Fürth's formula. The off-diagonal elements show the pair-wise RMSD between the programs. All values in µm.
| Positional error/µm | PACT | TLA | Autozell |
|---|---|---|---|
| PACT | 1.40 ± 0.05 | 1.9 | 2.6 |
| TLA | - | 0.36 ± 0.03 | 2.7 |
| Autozell | - | - | 1.36 ± 0.04 |