Figure 1. The multimode electromechanical parametric resonator array.

(a), An electron micrograph of the mechanical resonator integrated with piezoelectric transducers at both clamping points via the 2 dimensional electron gas (blue) and Schottky gate electrodes (yellow). The electromechanical resonator, when activated with the appropriate combination of inputs (HT: harmonic trigger PA: parametric actuation PC: parametric coupling) can act as a byte memory, a shift-register or an inverter logic gate. The resultant nanometre scale mechanical vibrations generate a piezovoltage which is amplified by an on-chip silicon nano-transistor, a room temperature transimpedance amplifier and is measured in a lock-in detector (b), Harmonically activating the electromechanical resonator in a homodyne measurement configuration reveals 75 resonances as indicated by each line up to 1.6 MHz. Periodically modulating the spring constant of the 75 harmonic modes at twice their frequency in a subharmonic detection configuration reveals 7 parametric resonances up to a frequency of 1.05 MHz and these elements of the array are sequentially labelled P1–P7 from low to high frequency. (c), A pulse sequence which can write binary information into the 7 parametrically resonating modes as detailed in Figs. 2j–2l and Figs. S1m–S1p enables the realisation of a binary phase information array.