Patterns composed of Au, Cu, and BSA arrays were fabricated by particle lithography: (A) 50 × 50 µm2 AFM image of the multicomponent patterns with periodicity of 1.57 µm; (B) zoom-in of (A) revealing the structural details; (C) 5 × 5 µm2 AFM image of the Au, Cu, and BSA arrays with periodicity of 0.73 µm; (D) zoom-in of (C) revealing the structural details. A Au equilateral triangle, a Cu isosceles triangle, and a BSA circle are highlighted in blue, orange, and green, respectively. The scale bar in (A) is 10 µm; the scale bars in (B) and (D) are 0.5 µm, and the scale bar in (C) is 1 µm.