Figure - PMC

Skip to main content

An official website of the United States government

Here's how you know

Here's how you know

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you've safely connected to the .gov website. Share sensitive information only on official, secure websites.

View full-text article in PMC

. 2014 Apr 14;4:4672. doi: 10.1038/srep04672

Search in PMC
Search in PubMed
View in NLM Catalog
Add to search

Copyright © 2014, Macmillan Publishers Limited. All rights reserved

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivs 3.0 Unported License. The images in this article are included in the article's Creative Commons license, unless indicated otherwise in the image credit; if the image is not included under the Creative Commons license, users will need to obtain permission from the license holder in order to reproduce the image. To view a copy of this license, visit http://creativecommons.org/licenses/by-nc-nd/3.0/

PMC Copyright notice

(a) FT-IR spectra of ALD-Al₂O₃ and SD-Al₂O₃ thin films, (b) XPS Al2p peaks of ALD-Al₂O₃ and SD-Al₂O₃ thin films, XPS O1s peak of ALD-Al₂O₃ (c) and SD-Al₂O₃ thin films.