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Schematic of the porous silicon nanopillar fabrication procedure: (a) formation of a monolayer of polystyrene (PS) nanospheres, (b) nanosphere etching via reactive ion etching, (c) gold deposition, (d) bead removal, and (e) catalytic chemical etch of the underlying silicon substrate. (f) Tilted SEM image of a porous silicon nanopillar array.
