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. Author manuscript; available in PMC: 2015 Mar 1.
Published in final edited form as: J Micromech Microeng. 2014 Feb 4;24(3):035003. doi: 10.1088/0960-1317/24/3/035003

Figure 5.

Figure 5

AFM micrographs of (a) alumina and Parylene C coated SIROF after laser ablation, and (b) Parylene C coated SIROF after laser ablation. The A+P coated SIROF had smaller grain size and less melt compared with Parylene coated SIROF.