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. Author manuscript; available in PMC: 2015 Mar 1.
Published in final edited form as: J Micromech Microeng. 2014 Feb 4;24(3):035003. doi: 10.1088/0960-1317/24/3/035003

Figure 7.

Figure 7

The voltammograms of iridium oxide with A+P (alumina and Parylene) and P (Parylene) coating after sequential etching processes of laser ablation (black), oxygen plasma (red) and BOE (green). The scan rate was 50 mV/s.