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Surface composition (at %) measured by XPS as a function of BOE etching of 52 nm alumina coated SIROF. No Al was detected after 8 minutes of BOE etching.
| BOE Etch time (minutes) |
O 1s | C 1s | Al 2p | Ir 4f |
|---|---|---|---|---|
| 0 | 54.41 | 1.06 | 44.53 | 0 |
| 5 | 57.40 | 0 | 30 | 14.70 |
| 8 | 44.98 | 0 | 0 | 55.02 |
