Table 2.
Reference | Material | dij [pm/V] | Vdevice [mm3] | Vpiezo [mm3] | fn [Hz] | RL [Ω ] | Vout [V] | Pdensity [W/cm3] | Power Factor [W/(g2cm3)] | |
---|---|---|---|---|---|---|---|---|---|---|
| ||||||||||
Name | Mode | |||||||||
[78] | AlN | d31 | - | 0.5 | 0.0004 | 1.4 × 103 | 650 × 103 | 1.6 | 4 × 10-3 | 248 × 10-6 |
[48] | PZT | d31 | 320 | 212.5 | 80.4 | 223.8 | 9.9 × 103 | - | 77 × 10-6 | 1.4 × 10-6 |
[61] | PZT | d33 | - | - | 0.00002 | 13.9 × 103 | 5.2 × 106 | 2.4 dc | - | - |
[63] | PZT | d33 | 100 | 3.5 | 0.014 | 118.1 | 4.5 × 106 | 4.7 | 136 × 10-6 | 543 × 10-6 |
PZT | d31 | -55 | 3.5 | 0.014 | 130.8 | 11 × 103 | 0.77 | 1.9 × 10-3 | 7.8 × 10-3 | |
[57] | PZT | d33 | 100 | 1.1 | 0.003 | 243 | 2 × 106 | 2 rms | 1.6 × 10-3 | 6.4 × 10-3 |
PZT | d31 | -55 | 1.1 | 0.003 | 243 | 9.9 × 103 | 1.5 rms | 2 × 10-3 | 8.1 × 10-3 | |
[77] | PZT | d15 | 700 | 171.2 | 65 | 73 | 2.2 × 106 | 6.2 | 51 × 10-6 | - |
[76] | PZT | d15 | 741 | 4.8 | 2.5 | 45 | 1.6 × 106 | 19 × 10-3 rms | 87 × 10-6 | 67.8 × 10-3 |
[74] | PMN-PT | d15 | 3,080 | 24,100 | 156 | - | 91 × 103 | 11.3 | 29 × 10-6 | 189 × 10-9 |
[35] | ZnO | d31 | 10 | - | 9.7 | 10 × 106 | 500 × 106 | 8 × 10-3 | 4 × 10-6 | 624 × 10-15 |
[68] | MFC | d33 | 400 | 340 | 120 | 22.5 | 4 × 106 | - | 494 × 10-6 | 17.1 × 10-3 |
[69] | PVDF | d33 | 33 | 549.5 | 24.2 | 1.5 | 10 × 106 | - | 364 × 10-6 | - |