| U11 | U22 | U33 | U12 | U13 | U23 | |
| Cl1 | 0.0314 (3) | 0.0597 (4) | 0.0649 (3) | 0.0089 (2) | −0.0083 (2) | −0.0045 (2) |
| O1 | 0.0335 (6) | 0.0355 (7) | 0.0536 (7) | 0.0015 (5) | −0.0141 (5) | 0.0023 (5) |
| O2 | 0.0543 (9) | 0.0558 (9) | 0.0619 (9) | −0.0033 (6) | −0.0090 (7) | −0.0195 (7) |
| N1 | 0.0304 (7) | 0.0367 (8) | 0.0378 (7) | 0.0046 (6) | −0.0069 (5) | −0.0024 (6) |
| N2 | 0.0365 (8) | 0.0382 (8) | 0.0497 (8) | 0.0084 (6) | −0.0094 (6) | −0.0035 (6) |
| C1 | 0.0294 (8) | 0.0379 (9) | 0.0321 (8) | 0.0039 (6) | −0.0057 (6) | −0.0005 (6) |
| C2 | 0.0382 (9) | 0.0447 (10) | 0.0418 (9) | 0.0044 (8) | −0.0038 (7) | 0.0129 (7) |
| C3 | 0.0342 (9) | 0.0454 (10) | 0.0456 (9) | 0.0018 (7) | 0.0038 (7) | 0.0068 (8) |
| C4 | 0.0316 (9) | 0.0442 (10) | 0.0368 (8) | 0.0072 (7) | −0.0034 (7) | −0.0030 (7) |
| C5 | 0.0423 (10) | 0.0432 (10) | 0.0445 (9) | 0.0091 (8) | −0.0071 (8) | 0.0099 (8) |
| C6 | 0.0390 (10) | 0.0379 (10) | 0.0435 (9) | 0.0020 (7) | −0.0014 (7) | 0.0076 (7) |
| C7 | 0.0258 (7) | 0.0365 (9) | 0.0364 (8) | 0.0000 (6) | −0.0044 (6) | 0.0037 (7) |
| C8 | 0.0302 (8) | 0.0366 (9) | 0.0386 (8) | −0.0034 (7) | −0.0030 (6) | 0.0003 (7) |
| C9 | 0.0340 (9) | 0.0393 (10) | 0.0453 (9) | 0.0013 (7) | −0.0021 (7) | −0.0040 (7) |
| C10 | 0.0360 (9) | 0.0442 (11) | 0.0409 (9) | −0.0062 (7) | −0.0037 (7) | −0.0020 (8) |
| C11 | 0.0350 (9) | 0.0340 (9) | 0.0308 (8) | 0.0012 (6) | −0.0042 (6) | 0.0031 (6) |
| C12 | 0.0340 (9) | 0.0490 (11) | 0.0386 (9) | 0.0006 (7) | −0.0020 (7) | −0.0009 (7) |
| C13 | 0.0440 (10) | 0.0539 (12) | 0.0468 (10) | −0.0090 (9) | −0.0097 (8) | −0.0019 (8) |
| C14 | 0.0658 (13) | 0.0454 (12) | 0.0467 (10) | −0.0040 (9) | −0.0104 (9) | −0.0069 (8) |
| C15 | 0.0623 (12) | 0.0430 (11) | 0.0429 (9) | 0.0136 (9) | 0.0021 (8) | −0.0035 (8) |
| C16 | 0.0360 (9) | 0.0432 (10) | 0.0412 (9) | 0.0062 (7) | −0.0023 (7) | 0.0021 (8) |
| C17 | 0.0530 (12) | 0.0482 (12) | 0.0741 (13) | 0.0116 (10) | −0.0122 (10) | −0.0135 (10) |