Figure 3.

(A) Three-dimensional diagram of galvanometer/sensor assembly. (B) The back reflected laser intensity was monitored while each galvanometer was independently scanned with a linear ramp waveform, resulting in the focused beam translating across the diameter of the BFP of the objective. TIR (high intensity regions) occurred near the radial periphery of the objective's BFP. The critical angle (red dash line) and alignment center (blue dash line) were found from analysis of the intensity derivative. (C) Back reflected light intensity during azimuthal illumination scanning. The intensity variability was caused by changes in the light’s incident angle at the Pellicle beamsplitter throughout the azimuthal scan. (D) Illumination intensity at objective throughout scanning. To see this figure in color, go online.