Table 1.
A brief presentation of the fabrication methods studied above with sensing applications based on the given time slots.
| Time Slots | [Ref.] /Year | Fabrication Techniques | with/without Splicing | with/without Air Gap | Sensing Applications |
|---|---|---|---|---|---|
| 1981–1990 | [2] (1982) | FPI is formed by two dielectric-coated high-reflectance end faces SMF | Without splicing | With air gap | Temperature, vibration, acoustic wave, voltage, magnetic field |
| [3] (1985) | A SMF is stretched through a tube so that vorex shedding can induce an oscillating strain | Without splicing | Without air gap | Flow velocity | |
| [4] (1988) | Coherence multiplexing remote fiber optic Fabry-Perot sensing technique | Without splicing | With air gap | Temperature | |
| [57] (1988) | FPI using dielectric mirrors by standard fusion splicing technique | With splicing | With air gap | Temperature and wavelength | |
| [68] (1990) | Semi-reflective fusion splice technique | With splicing | With air gap | Strain | |
| 1991–2000 | [69] (1991) | A miniature fiber Fabry-Perot interferometric modulation technique | With splicing | With air gap | Temperature |
| [56] (1994) | Micromachining technique | Without splicing | Without air gap | Pressure | |
| [55] (1995) | Low-coherence technique for multiplexed measurements | Without splicing | With air gap | Temperature and strain | |
| [6] (1996) | Micromachined Fabry-Perot interference-based microcavity fabrication | Without splicing | Without air gap | Pressure | |
| [59] (1996) | FPI ultrasound sensing with a thin polymer film | Without splicing | With air gap but water-filled cavity | Ultrasound | |
| [10] (1997) | FPI with Si3N/SiO2/Si3N4 diaphragm fabrication using micromachining technology | With splicing | With air gap | Pressure | |
| [15] (1999) | Ionic self-assembly monolayer (ISAM) technique | Without splicing | Without air gap | Humidity | |
| [71] (1999) | FPI cavity with low-finesse illuminated by a multimode optical fiber | With splicing | With air gap | Not studied | |
| [64] (2000) | Nanometer-scale Fabry-Perot interferometer by using the ISAM method | Without splicing | Without air gap | Humidity | |
| 2001–2010 | [60] (2001) | A thin transparent elastic polymer film used as a low-finesse Fabry– Perot interferometer | Without splicing | Without air gap | Strain |
| [65] (2001) | Langmuir-Blodgett (LB) technique | Without splicing | Without air gap | Not studied | |
| [30] (2004) | A magnetostrictive gauge and SMF are inserted in a hollow-core borosilicate tube and an airgap between these is acting as a cavity | Without splicing | With air gap | Magnetic field | |
| [153] (2006) | By polishing a thin layer of zeolite film on the end face of SMF | Without splicing | Without air gap | Dissolved organic matter (DOM) in water | |
| [123] (2007) | Two SMF is etched by acid and fusion spliced to form intrinsic FP cavity | With splicing | With air gap | Strain | |
| [23] (2008) | A miniature Fabry–Perot (FP) interferometricfiber-optic sensor | With splicing | With air gap | High temperature | |
| [72] (2009) | Microscopic air bubble FPI by simple splicing technique | With splicing | With air gap | Strain | |
| [39] (2009) | Two-mode interferometric sensor by fusion spliced technique | With splicing | With air gap | Temperature | |
| 2001–2010 | [74] (2009) | MEFPIs sensor by chemical etching technique | With splicing | With air gap | Strain and Temperature |
| [137] (2010) | FPI consisting of a segment of SMF tip coated with a SU-8 polymer thin film based on modulated Fresnel reflection | Without splicing | Without air gap | Refractive index | |
| 2011–2014 | [111] (2011) | Spliced a short length PCF with a standard SMF | With splicing | Without air gap | Pressure and high temperature |
| [66] (2012) | Focused ion beam (FIB) machining technique | Without splicing | Without air gap | High temperature | |
| [75] (2012) | Chitosan-based Fabry-Perot interferometry | With splicing | With air gap | Humidity | |
| [77] (2012) | Femtosecond laser micromachining and fusion splicing | With splicing | With air gap | Refractive index | |
| [45] (2013) | Thinned and roughened FPI's external surface of diaphragm by fs laser | With splicing | With air gap | High temperature | |
| [20] (2013) | Hybrid interferometric with micro cavity PFI and Mach-Sender | With splicing | With air gap | Strain | |
| [108] (2013) | Tunable micro cavity FPI by using polymer MEMS technology | Without splicing | With air gap | Pressure | |
| [73] (2013) | Spliced SMF with a silica tube | With splicing | With air gap | Pressure | |
| [31] (2014) | FPI cavity is filled with water based magnetic fluid EMG507 | Without splicing | Without air gap | Magnetic field | |
| [82] (2014) | Miniature FPI formed by bundle-core PCF and SMF fiber by splicing | With splicing | Without air gap | High temperature | |
| [154] (2014) | A small segment of silica rod spliced between two SMF | With splicing | With air gap | Pressure | |
| [135] (2014) | Fusion bonding with a fused-silica diaphragm by CO2 laser | Without splicing | With air gap | Liquid level |