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Schematic illustration of the formation process of PSiNWs through MACE method in HF/H2O2/AgNO3 system. (A) Ag nanoparticles deposit on silicon surface at the beginning. (B) SiNWs grow with the migration of Ag particle, and some Ag+ ions renucleate throughout the nanowires. (C) Numerous perpendicular pore channel form with the migration of renucleated Ag particle. (D) Porous structure can be obtained with the removal of Ag0.
