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Measured dimensions of topographies from scanning electron microscopy (SEM) images.
| Topography | Designed dimensions (nm) | Measured dimensions (nm) | |
|---|---|---|---|
| Diameter | Diameter | Pitch | |
| 1 μm pillars | 1000 | 1500 ± 20 | 6810 ± 60 |
| 1 μm wells | 1000 | 1180 ± 40 | 6890 ± 60 |
| 200 nm pillars | 200 | 193 ± 11 | 333 ± 18 |
| 250 nm wells | 250 | 223 ± 21 | 391 ± 16 |
