TABLE II.

Extracted model parameters.

Variables	Descriptions	Values
$m_d$	Diaphragm effective mass	0.81 × 10−9 kg
$C_d$	Diaphragm compliance	0.12 m/N
$m_{\mathit{b}\mathit{p}}$	Backplate effective mass	0.14 × 10−9 kg
$C_{\mathit{b}\mathit{p}}$	Backplate compliance	0.037 m/N
$R_m$	Backplate flow resistance	7.3 × 10−6 N·s/m