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. 2014 May 8;8(3):034101. doi: 10.1063/1.4875656

Figure 4.

Figure 4

The fabricated chamber and the final device after metallization are illustrated. (a) shows the optical image of the fabricated chamber after anisotropic wet chemical etching, (b) shows the top view of the fabricated chamber, and (c) shows the final calorimeter chip after metallization.