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SEM images of photoelectrochemically etched hierarchical silicon nanospikes membrane: (a) size comparison of the fabricated 13 mm diameter membrane with a U.S. one-cent coin, (b) top surface view, (c) 45° tilted view, and (d) zoomed-in view of ultrasharp nanospikes. Scale bars: (b) 10, (c) 20, and (d) 1 μm.
