Figure 2. TEM images of BTFO film deposited on Pt/Ti/SiO2/Si substrate.
A medium and a high magnification bright-field TEM image are shown in (a) and (b), respectively. In (b), the high quality of the layered structure is clearly visualized. In a dark-field TEM image, as shown in the inset, stripes corresponding to ferroelectric domains in a single grain can be observed.