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. Author manuscript; available in PMC: 2014 Jun 16.
Published in final edited form as: Microelectron Eng. 2011 Mar;88(3):247–253. doi: 10.1016/j.mee.2010.10.041

Table IV.

The Sensitivities of the Variant Devices.

Sensitivity Relative Shift
Single Planar Device 0.1097 MHz/N 2.9%
Single Suspended Device 0.1990 MHz/N 5.1%
Planar Triplet 0.0561 MHz/N 1.5%
Suspended Triplet 0.0867 MHz/N 2.2%