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. Author manuscript; available in PMC: 2014 Jun 16.
Published in final edited form as: Microelectron Eng. 2011 Mar;88(3):247–253. doi: 10.1016/j.mee.2010.10.041

Table V.

The Theoretical and Experimental Resonance Frequencies and Q-factors of the Variant Devices.

f0 (GHz) Q-Factor
Theoretical Experimental Theoretical Experimental
Single Planar Device 14.88 GHz 15.01 GHz 98.77 93.81
Single Suspended Device 15.31 GHz 15.18 GHz 117.41 102.06
Planar Triplet 14.90 GHz 15.06 GHz 57.62 51.90
Suspended Triplet 15.22 GHz 15.41 GHz 80.32 67.15