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. Author manuscript; available in PMC: 2014 Jun 16.
Published in final edited form as: Nano Today. 2013 Aug 6;8(4):347–387. doi: 10.1016/j.nantod.2013.07.001

Figure 1.

Figure 1

Fabrication of quartz nanowire (QNW) arrays. (a) Polystyrene nanoparticles (PS NPs) of ~100 nm diameter were spin coated onto quartz surface. (b) Oxygen plasma was used to reduce the size of PS NPs. (c) A thin layer of Cr metal (25 nm) was deposited followed by lift-off of PS NPs with N-methy1-2-pyrrolidone. (d) Ni metal was deposited and used as an etch mask. (e, f) Top- and tilted-view after second plasma etching. Wet chemical etchant was used to completely remove Ni metal. Scale bar is 200 nm in all images.

Reprinted (adapted) with permission from (Lee et al.; Nano Lett. 12 (2012) 2697–2704). Copyright (2012) American Chemical Society.