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. 2014 Jun 6;5:4085. doi: 10.1038/ncomms5085

Figure 1. Monolithic mid-infrared on-chip sensor.

Figure 1

The device comprised of a laser, a SPP waveguide and a detector, monolithically integrated on the same substrate. The upper inset shows the cross section of the structure and the lower inset the corresponding scanning electron microscope (SEM) image of the fabricated device.