SEM/confocal rigid registration errors on translation (t) and rotation (r)(
where tx and ty are translation errors in x and y directions respectively; t is in nm; pixel size is 40nm; r is in degree.) Here, the registration methods include: Original Image SSD and Original Image MI, registrations with original images based on SSD and MI metrics respectively; Standard IA SSD and Standard IA MI, registration with standard IA algorithm based on SSD and MI metrics respectively; Proposed IA SSD and Proposed IA MI, registration with our proposed IA algorithm based on SSD and MI metrics respectively.