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. 2014 Jun 10;9(1):292. doi: 10.1186/1556-276X-9-292

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Copyright © 2014 Maikap et al.; licensee Springer.

This is an Open Access article distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/4.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly credited.

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TEM images of the RRAM device. (a) A typical cross-sectional TEM image of a W/TaO_x/TiN memory device. The device size is 0.6 × 0.6 μm². (b) A HRTEM image showing the stacking layer of TaO_x and TiO_x.