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. Author manuscript; available in PMC: 2014 Jun 26.
Published in final edited form as: Opt Eng. 2012 Apr 19;51(4):043203. doi: 10.1117/1.OE.51.4.043203

Table 1.

Corrected versus original mirror facets’ tilt angles (αx, αy ) in radians.

Original mirror facets’ tilt angles
βx = 0.15 rad βx = 0.09 rad βx = 0.03 rad βx = −0.03 rad βx = −0.09 rad βx = −0.15 rad
βy = 0.09 rad (0.0750, 0.0450) (0.0450, 0.0450) (0.0150, 0.0450) (−0.0150, 0.0450) (−0.0450, 0.0450) (−0.0750, 0.0450)
βy = 0.03 rad (0.0750, 0.0150) (0.0450, 0.0150) (0.0150, 0.0150) (−0.0150, 0.0150) (−0.0450, 0.0150) (−0.0750, 0.0150)
βy = −0.03 rad (0.0750, −0.0150) (0.0450, −0.0150) (0.0150, −0.0150) (−0.0150, −0.0150) (−0.0450, −0.0150) (−0.0750, −0.0150)
βy = −0.09 rad (0.0750, −0.0450) (0.0450, −0.0450) (0.0150, −0.0450) (−0.0150, −0.0450) (−0.0450,−0.0450) (−0.0750, −0.0450)
Corrected mirror facets’ tilt angles
βx = 0.15 rad βx = 0.09 rad βx = 0.03 rad βx = −0.03 rad βx = −0.09 rad βx = −0.15 rad
βy = 0.09 rad (0.0812, 0.0427) (0.0487, 0.0442) (0.0162, 0.0449) (−0.0162, 0.0449) (−0.0487, 0.0442) (−0.0812, 0.0427)
βy = 0.03 rad (0.0802, 0.0128) (0.0482, 0.0142) (0.0161, 0.0149) (−0.0161, 0.0149) (−0.0482, 0.0142) (−0.0802, 0.0128)
βy = −0.03 rad (0.0794, −0.0170) (0.0476, −0.0157) (0.0159, −0.0151) (−0.0159, −0.0151) (−0.0476, −0.0157) (−0.0794, −0.0170)
βy = −0.09 rad (0.0786, −0.0468) (0.0472, −0.0456) (0.0157, −0.0451) (−0.0157, −0.0451) (−0.0472, −0.0456) (−0.0786, −0.0468)