Figure 7.

(a) Mechanical properties of thin films with hardness and Young’s modulus as a function of contact depth represented by bold square and diamond datum points, respectively, with corresponding open diamond and square datum points representing bulk mechanical properties. Typical load displacement curves showing (b) creep at maximum loads of 40 and 80 µN with a hold period of 200 s, and (c) effects of varying strain rate at a maximum load of 80 µN for loading–unloading periods of 20 and 200 s.