Figure 2. Reducing the density of grain boundaries with shape preservation of EBL–defined nanostructures.

Panels (a, b) show structures with Cr adhesion layers, while the rods in panel (c) have no adhesion layer. TEM image and electron diffraction pattern of the same ring structure before (a) and after annealing (b), showing a reduction in the density of grains and grain boundaries. (c) TEM images of a rod structure before and after annealing.