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. Author manuscript; available in PMC: 2014 Jul 14.
Published in final edited form as: J Microelectromech Syst. 2013 Jun 5;22(6):1327–1338. doi: 10.1109/JMEMS.2013.2259615

Fig. 11.

Fig. 11

Coefficient of variation versus number of beads 2.8 μm beads placed on the array for various error sources. Points indicate measured results and lines indicate simulated or calculated values. Thermal noise CV error is given for a measurement time of 480 ms per sensor (30 s for the entire array).