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. Author manuscript; available in PMC: 2014 Jul 14.
Published in final edited form as: J Microelectromech Syst. 2013 Jun 5;22(6):1327–1338. doi: 10.1109/JMEMS.2013.2259615

Fig. 9.

Fig. 9

(a) Optical image of the sensor chip containing 4 banks with 2048 active sensors each. (b) One half of a 2048 Hall sensor array bank with M280 beads covering approximately 2% of the surface.