Table 2. Rocking curve statistical parameters across the working region for assemblies (a) (b) and (c) (Fig. 5 ▶).

: standard deviation of the local rocking curve COM; : standard deviation of the local rocking curve FWHM; : average value of the local rocking curve FWHM.

Assembly	t (µm)	CVD springs	(µrad)	(µrad)	(µrad)
(a)	300	Nonperforated	1.4	0.4	25
(b)	100	Perforated	1.4	1.5	31
(c)	100	Nonperforated	3.5	1.5	31