| U11 | U22 | U33 | U12 | U13 | U23 | |
| Cl1 | 0.01652 (16) | 0.0338 (2) | 0.02036 (17) | −0.00018 (12) | 0.00735 (12) | −0.00404 (13) |
| O1 | 0.0116 (4) | 0.0215 (5) | 0.0159 (5) | −0.0032 (4) | 0.0015 (4) | −0.0009 (4) |
| O2 | 0.0227 (5) | 0.0370 (6) | 0.0190 (5) | −0.0015 (5) | 0.0093 (4) | 0.0010 (4) |
| O3 | 0.0252 (6) | 0.0309 (6) | 0.0200 (5) | −0.0059 (5) | 0.0003 (4) | −0.0027 (4) |
| C1 | 0.0158 (6) | 0.0182 (6) | 0.0159 (6) | −0.0030 (5) | −0.0003 (5) | 0.0014 (5) |
| C2 | 0.0187 (6) | 0.0174 (6) | 0.0138 (6) | −0.0019 (5) | 0.0009 (5) | 0.0026 (5) |
| C3 | 0.0182 (6) | 0.0197 (6) | 0.0144 (6) | −0.0004 (5) | 0.0032 (5) | 0.0041 (5) |
| C4 | 0.0134 (6) | 0.0200 (6) | 0.0183 (6) | −0.0005 (5) | 0.0038 (5) | 0.0047 (5) |
| C5 | 0.0132 (6) | 0.0200 (6) | 0.0185 (6) | −0.0012 (5) | 0.0004 (5) | 0.0039 (5) |
| C6 | 0.0173 (6) | 0.0177 (6) | 0.0147 (6) | 0.0006 (5) | 0.0005 (5) | 0.0006 (5) |
| C7 | 0.0147 (6) | 0.0196 (6) | 0.0165 (6) | 0.0019 (5) | 0.0044 (5) | 0.0026 (5) |
| C8 | 0.0147 (6) | 0.0169 (6) | 0.0140 (6) | −0.0002 (5) | 0.0025 (5) | 0.0039 (5) |
| C9 | 0.0116 (6) | 0.0154 (6) | 0.0157 (6) | −0.0011 (5) | 0.0004 (5) | 0.0026 (5) |
| C10 | 0.0248 (7) | 0.0257 (7) | 0.0138 (6) | −0.0017 (6) | 0.0024 (5) | 0.0014 (5) |
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