Table 2.
Valve design parameters
| Valve ID | A | B | C | D | E |
|---|---|---|---|---|---|
| Layout |
|
|
|
|
|
| Occupied Diameter (μm) | 450 | 450 | 450 | 450 | 450 |
| Element Line Width (μm) | 20 | 20 | 5 | 5 | 40 |
| Total Element Length (μm) | 1312 | 1152 | 1878 | 1178 | 1100 |
| Element Style | Serpentine | Circular | Serpentine | Circular | Circular |
| Element Corner Geometry | Square | Square | Square | Square | Rounded |