Table 5.

Parameters used in the investigation of the valve opening performance using a test fixture

Experimental Condition	Valve IDa	Valve Structure and Material (Thickness)			Medium		Applied Pressure (mmHg)	Applied Current Modeb	Thermistor	Package	Number of Valves Tested	Number of Valves Opened	Typical Valve Opening Resultsc	Typical Resistive Element Performanced	Valve Opening Currents (mA) or Current Ramping Rate (mA/sec)
		Bottom Parylene	Metal	Top Parylene	Bottom	Top
1	A	2 μm	Pt (2000 Å )	N/A	Air	Air	0	CC	No	No	9	8	O or X	S or B	25.0–30.0
2	B	2 μm	Pt (2000 Å )	N/A	Air	Air	0	CC	No	No	6	5	O or X	S or B	25.0–32.5
3	C	2 μm	Pt (2000 Å )	N/A	Air	Air	0	CC	No	No	6	5	O or X	S or B	7.5–12.5
4	D	2 μm	Pt (2000 Å )	N/A	Air	Air	0	CC	No	No	7	6	O or X	S or B	7.5–15.0
5	A	2 μm	Pt (2000 Å )	N/A	Water	Air	0	CC	No	No	2	0	X	B	N/A
6	B	2 μm	Pt (2000 Å )	N/A	Water	Air	0	CC	No	No	2	0	X	B	N/A
7	C	2 μm	Pt (2000 Å )	N/A	Water	Air	0	CC	No	No	4	1	O or X	S or B	20
8	D	2 μm	Pt (2000 Å )	N/A	Water	Air	0	CC	No	No	2	0	X	B	N/A
9	A	2 μm	Ti (5000 Å )	N/A	Water	Air	0	CC	No	No	6	0	O− or X	S or D	N/A
10	A	2 μm	Ti (5000 Å )	N/A	Water	Air	0	CR	No	No	3	1	O, O−, or X	S or D	1.67 (CR)
11	A	2 μm	Ti (10000 Å )	8 μm	Water	Air	0	CC	No	No	4	4	O	S	30
12	A	2 μm	Ti (10000 Å )	8 μm	Water	Air	200	CC	No	No	2	0	X+ or X	S or B	N/A
13	A	2 μm	Ti (10000 Å )	8 μm	Water	Air	200	CC	Yes	No	3	0	O−/P or X	S or B	N/A
14	A	2 μm	Ti (10000 Å )	8 μm	Water	Water	200	CC	Yes	No	2	0	X	B	N/A
15	E	10 μm	Ti (7500 Å )	10 μm	Water	Air	0	CC	No	No	5	1	O, O− or X	S or B	40
16	E	10 μm	Ti (7500 Å )	10 μm	Water	Air	0	CC	Yes	No	5	4	O or OX	SB	35
17	E	10 μm	Ti (7500 Å )	10 μm	Water	Air	200	CC	Yes	No	7	3	O, XP, or X	S or B	38 and 50
18	E	10 μm	Ti (7500 Å )	10 μm	Water	Water	200	CC	Yes	No	5	0	O−/P or X+/P	SB	N/A
19	E	10 μm	Ti (7500 Å )	10 μm	Water	Air	200	RF	Yes	No	1	0	LP	N/A	N/A
20	E	10 μm	Ti (7500 Å )	10 μm	Water	Air	200	RF	No	No	1	0	O−/P	S	N/A
21	E	10 μm	Ti (7500 Å )	10 μm	Air	Air	200	RF	No	No	1	1	O	S	39e
22	C	2 μm	Pt (2000 Å )	N/A	Water & Air Pocket	Air	200	CC	No	Yes	5	1	O or X	S or B	27.5
23	C	2 μm	Pt (2000 Å )	N/A	Water & Air Pocket	Air	200	RF	No	Yes	2	0	O− or X	S or B	N/A
24	A	2 μm	Pt (2000 Å )	7 μm	Water	Air	200	CC	No	Yes	2	0	X	S	N/A
25	E	10 μm	Ti (7500 Å )	10 μm	Water	Air	200	RF	Yes	Yes	1	0	LP	N/A	N/A
26	E	10 μm	Ti (7500 Å )	10 μm	Water & Air Pocket	Air	200	RF	No	Yes	4	1	O or X+/P	S	58e

^aSee Table 2 for key.

^bCC: constant current, CR: current ramping, and RF: radio frequency power transfer.

^cO: valve opened successfully, O−: valve opened partially, X+: small opening hole formed, X: valve did not open, P: Parylene balloon, and LP: insufficient power to open.

^dB: element broke instantly, S: element broke during operation, and D: element broke instantly and detached from valve membrane.

^eThis power was estimated using a series resistor with the same resistance as the valve immediately before the opening experiment.