Figure 7.

Optical density at the Co L₃ edge and apparent cobalt thickness of CoO_xN_yC_z layers grown autocatalytically from Co(CO)₃NO on Fe layers plotted against the Fe layer thickness. The Fe layers were prepared by EBID and autocatalytic growth by using Fe(CO)₅. In a second step, Co(CO)₃NO was dosed for 210 min to produce the CoO_xN_yC_z layers via (auto-)catalytic decomposition. The optical density and thickness are corrected to account for the absorption of the Fe deposit underneath (see text). The OD of the CoO_xN_yC_z layer is almost independent of the Fe layer thickness for Fe layers thicker than 4 nm.