Figure 1.
Morphological characterization of porous silicon substrates. Top view ESEM images of (a) macroporous silicon substrate with a pore diameter of 1 to 1.5 μm and (b) nanoporous silicon with pore sizes less than 50 nm.
Morphological characterization of porous silicon substrates. Top view ESEM images of (a) macroporous silicon substrate with a pore diameter of 1 to 1.5 μm and (b) nanoporous silicon with pore sizes less than 50 nm.