| U11 | U22 | U33 | U12 | U13 | U23 | |
| Cd1 | 0.0242 (5) | 0.0207 (5) | 0.0097 (4) | −0.0101 (4) | −0.0019 (4) | 0.0028 (4) |
| Cd2 | 0.0155 (5) | 0.0196 (5) | 0.0088 (4) | −0.0055 (4) | 0.0000 (3) | 0.0000 (3) |
| O1 | 0.031 (4) | 0.030 (4) | 0.024 (3) | −0.020 (3) | −0.007 (3) | 0.003 (3) |
| O2 | 0.018 (3) | 0.020 (3) | 0.018 (3) | −0.008 (3) | 0.002 (2) | −0.001 (2) |
| N11 | 0.017 (2) | 0.017 (2) | 0.014 (2) | −0.0080 (16) | −0.0034 (16) | 0.0051 (16) |
| N12 | 0.020 (4) | 0.020 (4) | 0.014 (3) | −0.011 (3) | −0.001 (3) | 0.000 (3) |
| C101 | 0.031 (5) | 0.018 (4) | 0.012 (4) | −0.015 (4) | 0.000 (4) | −0.002 (3) |
| C102 | 0.023 (5) | 0.031 (5) | 0.012 (4) | −0.012 (4) | 0.003 (3) | 0.000 (4) |
| C103 | 0.025 (5) | 0.022 (5) | 0.006 (4) | −0.007 (4) | −0.007 (3) | 0.001 (3) |
| C104 | 0.026 (5) | 0.021 (5) | 0.019 (4) | −0.011 (4) | 0.003 (4) | −0.002 (4) |
| C105 | 0.025 (5) | 0.031 (5) | 0.015 (4) | −0.015 (4) | 0.002 (4) | 0.003 (4) |
| C106 | 0.024 (5) | 0.022 (5) | 0.013 (4) | −0.001 (4) | −0.001 (3) | 0.001 (4) |
| C107 | 0.025 (5) | 0.013 (4) | 0.014 (4) | 0.001 (4) | 0.001 (3) | −0.003 (3) |
| C108 | 0.032 (5) | 0.024 (5) | 0.017 (5) | −0.010 (4) | 0.000 (4) | 0.001 (4) |
| C109 | 0.032 (5) | 0.021 (5) | 0.011 (4) | −0.008 (4) | 0.005 (4) | −0.003 (3) |
| C110 | 0.039 (6) | 0.027 (5) | 0.008 (4) | −0.004 (4) | −0.002 (4) | 0.000 (4) |
| C111 | 0.036 (5) | 0.019 (4) | 0.006 (4) | −0.006 (4) | 0.004 (4) | 0.000 (3) |
| C112 | 0.026 (5) | 0.024 (5) | 0.017 (4) | −0.008 (4) | −0.001 (4) | −0.002 (4) |
| C113 | 0.017 (4) | 0.016 (4) | 0.016 (4) | −0.001 (4) | −0.004 (3) | 0.001 (3) |
| C114 | 0.021 (5) | 0.028 (5) | 0.018 (4) | −0.016 (4) | −0.003 (4) | −0.001 (4) |
| C115 | 0.026 (5) | 0.024 (5) | 0.014 (4) | −0.010 (4) | −0.006 (4) | 0.001 (4) |
| N21 | 0.023 (4) | 0.029 (4) | 0.008 (3) | −0.014 (3) | 0.002 (3) | 0.003 (3) |
| N22 | 0.012 (2) | 0.012 (2) | 0.009 (2) | −0.0042 (16) | 0.0046 (16) | −0.0034 (16) |
| C201 | 0.028 (5) | 0.026 (5) | 0.010 (4) | −0.007 (4) | 0.000 (3) | −0.001 (4) |
| C202 | 0.029 (5) | 0.031 (5) | 0.015 (4) | −0.008 (4) | 0.001 (4) | −0.001 (4) |
| C203 | 0.029 (5) | 0.036 (6) | 0.015 (4) | −0.019 (4) | 0.002 (4) | −0.004 (4) |
| C204 | 0.045 (6) | 0.019 (5) | 0.022 (5) | −0.016 (4) | −0.006 (4) | −0.001 (4) |
| C205 | 0.042 (6) | 0.025 (5) | 0.022 (5) | −0.018 (5) | −0.007 (4) | 0.002 (4) |
| C206 | 0.033 (6) | 0.045 (6) | 0.016 (5) | −0.018 (5) | −0.006 (4) | 0.000 (4) |
| C207 | 0.022 (5) | 0.045 (6) | 0.015 (4) | −0.014 (5) | −0.002 (4) | 0.000 (4) |
| C208 | 0.023 (5) | 0.035 (5) | 0.008 (4) | −0.009 (4) | 0.000 (3) | 0.003 (4) |
| C209 | 0.023 (5) | 0.020 (5) | 0.013 (4) | −0.007 (4) | −0.005 (3) | 0.009 (3) |
| C210 | 0.021 (5) | 0.025 (5) | 0.012 (4) | −0.004 (4) | 0.000 (3) | 0.000 (4) |
| C211 | 0.019 (5) | 0.025 (5) | 0.004 (4) | −0.006 (4) | −0.001 (3) | −0.004 (3) |
| C212 | 0.013 (4) | 0.025 (5) | 0.017 (4) | −0.003 (4) | 0.001 (3) | −0.004 (4) |
| C213 | 0.020 (5) | 0.017 (4) | 0.013 (4) | −0.006 (4) | 0.004 (3) | −0.001 (3) |
| C214 | 0.018 (4) | 0.023 (5) | 0.015 (4) | −0.008 (4) | 0.001 (3) | 0.000 (3) |
| C215 | 0.026 (5) | 0.021 (5) | 0.010 (4) | −0.010 (4) | 0.003 (3) | 0.002 (3) |
| N31 | 0.026 (5) | 0.038 (5) | 0.034 (5) | −0.015 (4) | 0.002 (4) | −0.008 (4) |
| N32 | 0.033 (5) | 0.042 (5) | 0.031 (5) | −0.018 (4) | −0.005 (4) | 0.010 (4) |
| C301 | 0.032 (6) | 0.025 (5) | 0.040 (6) | −0.019 (4) | 0.003 (4) | −0.005 (4) |
| C302 | 0.026 (5) | 0.031 (5) | 0.019 (5) | −0.008 (4) | −0.006 (4) | 0.005 (4) |
| C303 | 0.019 (4) | 0.025 (5) | 0.007 (4) | −0.013 (4) | −0.005 (3) | 0.002 (3) |
| C304 | 0.021 (4) | 0.024 (4) | 0.016 (4) | −0.010 (3) | −0.007 (3) | 0.010 (3) |
| C305 | 0.028 (5) | 0.045 (6) | 0.013 (4) | −0.020 (5) | 0.002 (4) | −0.008 (4) |
| C306 | 0.040 (6) | 0.019 (5) | 0.028 (5) | −0.016 (4) | −0.007 (4) | 0.007 (4) |
| C307 | 0.026 (5) | 0.024 (5) | 0.030 (5) | −0.005 (4) | −0.007 (4) | −0.007 (4) |
| C308 | 0.025 (5) | 0.039 (6) | 0.032 (5) | −0.007 (5) | −0.006 (4) | −0.012 (5) |
| C309 | 0.032 (5) | 0.035 (5) | 0.016 (4) | −0.012 (4) | −0.001 (4) | −0.003 (4) |
| C310 | 0.040 (6) | 0.032 (5) | 0.030 (5) | −0.020 (5) | −0.007 (4) | 0.003 (4) |
| C311 | 0.021 (5) | 0.023 (5) | 0.024 (5) | −0.016 (4) | 0.007 (4) | 0.002 (4) |
| C312 | 0.031 (6) | 0.022 (5) | 0.042 (6) | −0.014 (4) | −0.006 (5) | −0.002 (4) |
| C313 | 0.028 (6) | 0.024 (5) | 0.057 (7) | −0.007 (4) | 0.010 (5) | 0.012 (5) |
| C314 | 0.043 (6) | 0.020 (5) | 0.021 (5) | −0.021 (5) | −0.007 (4) | −0.001 (4) |
| C315 | 0.024 (4) | 0.018 (4) | 0.028 (4) | −0.009 (3) | −0.005 (3) | 0.012 (3) |
| Cl1 | 0.0150 (11) | 0.0345 (13) | 0.0266 (12) | −0.0066 (10) | 0.0037 (9) | −0.0067 (10) |
| O3 | 0.016 (3) | 0.035 (4) | 0.031 (4) | −0.003 (3) | 0.013 (3) | −0.003 (3) |
| O4 | 0.029 (4) | 0.047 (5) | 0.044 (4) | 0.005 (3) | −0.012 (3) | −0.002 (4) |
| O5 | 0.048 (5) | 0.066 (5) | 0.029 (4) | −0.041 (4) | 0.015 (3) | −0.010 (3) |
| O6 | 0.028 (4) | 0.042 (4) | 0.043 (4) | −0.013 (3) | −0.003 (3) | −0.023 (3) |
| Cl2 | 0.0286 (13) | 0.0232 (12) | 0.0387 (14) | −0.0086 (10) | −0.0094 (10) | 0.0107 (10) |
| O7 | 0.049 (5) | 0.028 (4) | 0.055 (5) | −0.024 (3) | −0.012 (4) | 0.023 (3) |
| O8 | 0.055 (5) | 0.051 (5) | 0.061 (5) | −0.026 (4) | −0.024 (4) | 0.043 (4) |
| O9 | 0.046 (5) | 0.067 (6) | 0.070 (6) | −0.005 (4) | 0.005 (4) | −0.036 (5) |
| O10 | 0.024 (4) | 0.028 (4) | 0.056 (5) | −0.010 (3) | −0.010 (3) | 0.000 (3) |
| C1 | 0.046 (7) | 0.061 (8) | 0.028 (6) | −0.016 (6) | −0.001 (5) | −0.001 (5) |
| C2 | 0.064 (8) | 0.045 (7) | 0.029 (6) | −0.003 (6) | −0.005 (5) | −0.003 (5) |
| O11 | 0.117 (8) | 0.044 (5) | 0.043 (5) | 0.005 (5) | −0.003 (5) | 0.001 (4) |
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