U11	U22	U33	U12	U13	U23
Cl	0.0703 (9)	0.0469 (7)	0.0553 (8)	−0.0003 (8)	−0.0160 (6)	0.0032 (7)
O1	0.067 (3)	0.051 (2)	0.040 (2)	0.008 (2)	−0.023 (2)	0.000 (2)
C1	0.031 (3)	0.046 (3)	0.029 (3)	−0.002 (3)	−0.006 (2)	−0.003 (2)
N1	0.041 (3)	0.052 (3)	0.026 (2)	0.002 (2)	−0.008 (2)	0.000 (2)
O2	0.070 (3)	0.046 (2)	0.053 (2)	−0.008 (3)	−0.023 (2)	−0.007 (2)
C2	0.039 (3)	0.050 (3)	0.030 (3)	0.003 (3)	0.002 (3)	−0.003 (2)
N2	0.041 (3)	0.051 (3)	0.031 (2)	−0.003 (2)	−0.008 (2)	−0.003 (2)
N3	0.057 (3)	0.049 (2)	0.031 (2)	−0.004 (3)	−0.016 (2)	−0.004 (2)
C3	0.039 (3)	0.046 (3)	0.026 (3)	0.001 (3)	−0.006 (2)	−0.003 (3)
C4	0.032 (3)	0.040 (3)	0.028 (3)	0.006 (2)	−0.003 (2)	0.006 (2)
C5	0.040 (3)	0.048 (3)	0.032 (3)	0.004 (3)	−0.005 (2)	0.004 (2)
C6	0.060 (4)	0.051 (3)	0.067 (4)	0.008 (3)	−0.023 (3)	0.012 (3)