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. 2014 Jul 22;14(7):13173–13185. doi: 10.3390/s140713173

Figure 2.

Figure 2.

Illustration of the principle behind the sensor, which integrates four cantilevers (MEMS hair cells) at each of the layer transition points, i.e., in the bulk-micromachined silicon layer, positioned at the locations shown by the black arrows.