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. 2014 Jul 22;14(7):13173–13185. doi: 10.3390/s140713173

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© 2014 by the authors; licensee MDPI, Basel, Switzerland.

This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).

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Figure 3. — Actual physical layout of the structure consisting of: (1) top-glass canal (green quadrants in upper-left and bottom-right), (2) bottom-glass canal (lilac quadrants in bottom-left and upper right), (3) bulk micromachined silicon layer connecting upper and lower quadrants, intercepted by four flaps (light blue Π-shaped cuts in a 3.1 μm silicon membrane) that are oriented in same direction in all cases and which contain a piezo-resistor centered on each of the membrane's uncut side, (4) various conductors for powering the Wheatstone Bridge (VDD, GND) and differential outputs (V+, V−).