Table 1.

Pyramidal microtip etching time and the measured KOH etching results for various side lengths (L) of the square pattern of the etching mask.

Mask Pattern Side Length: L (μm)	150	200	250	300	350	400	450	500
Etching Time: T (min)	85	180	260	390	465	570	690	820
Pyramidal Tip Height: H (μm)	82 ± 3	98 ± 3	124 ± 3	152 ± 4	180 ± 3	191 ± 3	222 ± 2	252 ± 3
Pyramidal Tip Base Width: W (μm)	42 ± 2	53 ± 2	72 ± 2	86 ± 2	102 ± 1	117 ± 1	132 ± 2	146 ± 1