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. 2014 Sep 15;9(1):495. doi: 10.1186/1556-276X-9-495

Figure 1.

Figure 1

Schematic illustration of the fabrication of ordered Si nanopillars. (a) A close-packed monolayer of PS nanospheres on a clean Si substrate, (b) after RIE, (c) after Au deposition, (d) after the MACE, and (e) after the removal of the Au and the remained PS nanospheres.